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MIDAS MDA-400LJ Mask Aligner

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Price : Call

Code: #17670

Supplier: MIDAS SYSTEM CO.,LTD.

Mask Aligner is equipment used in photo-lithography process and the ability to precisely align the photomask and the substrate with the patterned.

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  • Type

    Fully manual (Mask Aligner)

    Mask size

    up to 5" x 5"

    Substrate size

    piece to 4" dia

    UV lamp & Power

    UV-LED & power supply

    Uniform beam size

    125mm dia

    Beam Uniformity

    <±3%

    Beam wavelength

    365nm Only

    365nm Intensity

    ~20mW/cm2

    Alignment accuracy

    1um

    Process resolution

    1um@1um PR thickness with vacuum contact

    Process mode

    Soft, Hard, Vacuum contact & Proximity

    Substrate chuck moving

    x,y,z & θ

    Options

    etc.

  • - Easy operation & Installation
    - Handling Substrates of Various sizes
    - Adopt UV-LED exposure module
    - UV-LED Life-time is long

 

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