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MIDAS Spin-5000A, 7000A Spin Coater

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Code: #17655

Supplier: MIDAS SYSTEM CO.,LTD.

Spin coating is a procedure used to deposit uniform thin films onto flat substrates. The spin coater used to apply photoresist to the surface of a silicon wafer.

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  • Type

    Spin coater system

    Substrate size

    piece ~ up to 12" circle / 500x500mm

    Rotation speed

    300 ~ 5,000rpm / ~2,000rpm (@without load) , Error rate ≤1%

    AC Servo Motor

    Spin state

    50steps, 20recipes (digital type)

    Bowl

    Stainless steel / Stainless steel, Chuck cover type

    Acceleration / Deceleration rate

    Variable

    Chuck material

    Anodized AL, Acetal

    Electric power

    220V, 5A / 10A

    Oilless vacuum pump pressure

    -650mmHg

    Dimensions (mm)

    Customized

    Options

    Number of Dispenser nozzle

    Type of chemical

    Drain type

    etc.

  • - Programmable Recipe management
    - Easy operation
    - Adopt Drain, Exhaust hole in bowl

 

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