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Midas MDA-20000SA Mask Aligner

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Code: #17664

Mask Aligner is equipment used in photo-lithography process and the ability to precisely align the photomask and the substrate with the patterned.

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Type	Joystick control Semi-Auto (Mask Aligner)
Mask size	up to 610 x 610 (User spec.)
Substrate size	500 x 500 (User spec.)
UV lamp & Power	2kW & power supply
UV lamp & Power	5kW & Power supply
Uniform beam size	600 x 600 (User spec.)
Beam Uniformity	<±7%
Beam wavelength	350 ~ 450nm
Process mode	Soft, Hard contact & Proximity
Substrate chuck moving	x,y,z & θ (Motorized)
Frame	Anti-Vibration system
Options	UV Intensity meter
Options	etc.

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