technology

HOME // TECHNOLOGY // Electronic and Information Technology

right Electronic and Information Technology See all product

Midas MDA-20000SA Mask Aligner

☆☆☆☆☆ ( 0 rates ) 261
Price : Call

Code: #17664

Supplier: MIDAS SYSTEM CO.,LTD.

Mask Aligner is equipment used in photo-lithography process and the ability to precisely align the photomask and the substrate with the patterned.

Add to card

rightMORE INFORMATION

  • Type

    Joystick control Semi-Auto (Mask Aligner)

    Mask size

    up to 610 x 610 (User spec.)

    Substrate size

    500 x 500 (User spec.)

    UV lamp & Power

    2kW & power supply

    5kW & Power supply

    Uniform beam size

    600 x 600 (User spec.)

    Beam Uniformity

    <±7%

    Beam wavelength

    350 ~ 450nm

    Process mode

    Soft, Hard contact & Proximity

    Substrate chuck moving

    x,y,z & θ (Motorized)

    Frame

    Anti-Vibration system

    Options

    UV Intensity meter

    etc.

  • - Easy operation UI
    - PC Operation with PLC control
    - Image grab & Data log
    - More than 100 Program recipes
    - Motorized joystick control
    - Microscope position control system

 

rightRELATED PRODUCTS

Scroll