Dual Accu Phase (DAP) software delivers absolute PTR metrology correlation to baseline AFM benchmarks for variable material sliders
Fast Tip/Tilt Mode provides easiest operational capability and best repeatability for 24x7 production runs
SureVision software enables etch depth and position measurements without operator intervention via automatic pattern recognition of features of interest
Advanced software analyses offers a broad range of additional functionality
Light tower highlights operational status to factory floor personnel
Bar code scanner delivers streamlined material and workflow handling