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Midas PL200/400/600 Nano Imprint Equipment

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Code: #17659

Supplier: MIDAS SYSTEM CO.,LTD.

Nano/Micro imprint is equipment that can manufacture a pattern of nm/um size. It is equipment capable of producing an low cost, high-efficiency, high-resolution pattern in which the surface pattern of stamps is replicated on the resist.

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  • • Substrate size: PL200: 2 inch, PL400: 4 inch, PL600: 6 inch (smaller sizes, irregular shapes compatible)
    • Imprint areaSame as wafer size
    • Mold plate size: PL200: 2, 1 inch, PL 400: 4, 3, 1 inch, PL600: 6, 4, 2, 1 inch
    • Imprint pressure1 psi standard
    • Mold/substrate Auto releaseIncluded- no special tools needed
    • UV exposure time2 ~3 min at 95 % intensity level
    • Alignment capabilityX, Y, Z and theta (accuracy 2 μm)

  • - Easy to use, low cost solution
    - Sub -10nm resolution with 99% yield
    - Support both soft and hard molds
    - Versatile processes for a wide variety of applications: optical devices, display, data storage, biomedical devices, semiconductor IC's, chemical synthesis and advanced materials.

 

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