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Ion Milling System IM4000

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Code: #16561

Supplier: Hitachi Asia (Vietnam) Co., Ltd.

Hybrid Instrument With Cross-section milling and Flatmilling.

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rightMORE INFORMATION

  • ● Hybrid model : Two milling configurations available
    - Cross-section milling : smooth polishing of cross-section specimens for high resolution imaging of subsurface structures.
    - Flatmilling : uniform polishing of surfaces as large as 5 mm with variable angle milling to selectively enhance specimen surface features.
    ● Higher Throughput : Improved milling efficiency
    - Reduced cross-sectioning times with new ion gun design compared to previous E-3500 model. (Max.Milling rate: 300 µm/h for Si - 66% reduction in processing time)
    ● Removable sample stage unit :
    - Removable sample stage unit for convenient specimen setting and cutting edge definition

  • Items

    Description

    Cross-section milling holder

    Flatmilling holder

    Gas used

    Ar (argon) gas

    Accelerating voltage

    0 to 6 kV

    Maximum milling rate*1*2(Materials Si)

    Approx. 300 µm/h*1*2

    Approx. 20 µm/h*3(spot)
    Approx. 2 µm/h*4(flat)

    Maximum sample size

    20(W)×12(D)×7(H) mm

    Φ50×25(H) mm

    Sample moving range

    X±7 mm, Y 0 to +3 mm

    X 0 to +5 mm

    Rotation angle

    -

    1 r/m, 25 r/m

    Swing angle

    ±15°, ±30°, ±40°

    ±60°, ±90°

    Tilt

    -

    0 - 90°

    Gas flow rate control system

    Mass flow controller

    Evacuation system

    Turbo-molecular pump (33 L/s) + Rotary Pump(135 L/min at 50 Hz, 162 L/min at 60 Hz)

    Dimension

    616(W)×705(D)×312(H) mm

    Weight

    Main unit 48 kg+Rotary pump 28 kg

    Optional Accessories

    Optical microscope for viewing of the specimen during milling

 

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