APPLICATION FIELDS:
- Flip chip, memory, LSI bump, Wafer bump,...
FEATURES:
- In-Line Bump Detection by Automatic Inspection Algorithm
- High-Speed Oblique Computed Tomography Technology
- 60° Oblique Angle & 360° around A FOV of interest
- Open microfocus tube with transmission target
- Tube Voltage Range : 10 ~ 160kV
- Current Range : 50 ~ 1000μA
- Max. tube power : 80W
- Max. target power : 10W
- Min. Detectability : 0.5μm
- 160kV High-Tension Generator