- Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
- Resolution improved by 20% than previous models (Regulus8220/8230/8240: 0.9 nm/1 kV; Regulus8100: 1.1 nm/1 kV)
- Maximum magnification doubled from 1 million times to 2 million times*2
- User-support functions to ensure high performance