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Ultra-high Resolution Scanning Electron Microscope Regulus Series

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Code: #16822

Supplier: Hitachi Asia (Vietnam) Co., Ltd.

The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.

rightMORE INFORMATION

  • - Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
    - Resolution improved by 20% than previous models (Regulus8220/8230/8240: 0.9 nm/1 kV; Regulus8100: 1.1 nm/1 kV)
    - Maximum magnification doubled from 1 million times to 2 million times*2
    - User-support functions to ensure high performance

  •  

    Regulus 8100

    Regulus 8220

    Regulus 8230

    Regulus 8240

    Secondary Electron Resolution

    0.8 nm (Vacc: 15 kV)
    1.1 nm (Landing voltage: 1 kV)*3

    0.7 nm (Vacc: 15 kV)
    0.9 nm (Landing voltage: 1 kV)*3

    Accelerating voltage

    0.5~30 kV

    0.5~30 kV

    Landing voltage*3

    0.1~2 kV

    0.01~20 kV

    Mag.

    20~1,000,000 ×*4

         

    Specimen stage

    Stage control

    3-axis motor drive*5

    5-axis motor drive

    Movable range

    X

    0~50 mm

    0~50 mm

    0~110 mm

    0~110 mm

    Y

    0~50 mm

    0~50 mm

    0~110 mm

    0~80 mm

    R

    360°

    T

    -5~70°

    Z

    1.5~30 mm

    1.5~40 mm

    Stage repeatability

    -

    -

    -

    Less than ±0.5 µm

 
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