● Best-in-class resolution in a compact system.
The FlexSEM has employed a newly designed electrical optical system and reliability-proven high-sensitivity detector, achieving imaging at 4 nm.
● Novel low vacuum technologies enable observation of non-conductive specimens without preprocessing.
● The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience level. Specifically, the new and enhanced navigation function, SEM MAP, helps locate the regions of interest quickly, and delivers accurate correlated optical and SEM images using only one click.
Compact & High-Performance Column
Best-in-class resolution in a compact system. The FlexSEM employs a newly designed electrical optical system with a reliability-proven high-sensitivity detector, achieving imaging at 4 nm.
High resolution image
The electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission current.