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RTP System(RAPID THEAL PRORMCESS SYSTEM)-ZRT-100

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Code: #16369

Supplier: ZETONE

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Specifications
Substrate size	100mm(4inch)
Heater temperature	Max. 1,000℃
Heater element	IR lamp, 18KW
Heating Zone	Upper & Bottom(Programmable)
Process gas	Max. 3channel(Flow meter)
Ultimate pressure	≤5×10-3 Torr
Vacuum pump	Rotary pump
Process control	State panel control
Compact size and low cost system
Optional	Touch panel screen
	Mass Flow Control
	Substrate up & down motion(±1inch

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