Multi-Functional Physical Vapor Deposition System-ZP3-CT

Specifications

Main Chamber Module

·Chamber Part

⒜ Panelized Type

1

: Stainless steel frame with 6AL-Panel

: Hinged front door type

⒝ Chamber FRAME

1

⒞ Turbo molecular pump : 400L/sec

1

· Valve Part

⒜Gate valve : between Chamber and TMP

1

⒝ Conductance valve : Manual type

1

⒞ Right angle valve

2

⒟ Venting valve

2

· Vacuum Measurement Part

⒜Ion Gauge (High Vacuum)

1

⒝ Convectron Gauge (Low Vacuum)

2

⒞ Gauge Cotroller

1

· Magnetron Sputtering Cathode

⒜ 2inch diameter

1

⒝ DC Power Supply : 1kw (1000V, 1A)

1

· Thermal Evaporator

⒜Electrode

1

⒝ AC Power 1.5kw (5V, 300A)

1

· Substrate Part

⒜Rotation

· Thickness Monitor

⒜Monitor and sensor part

1

· Gas Delivery Part

⒜MFC : Ar, O2

2

⒝Gas Vlave

2

Pump Module

· Rotary Pump : 200L/sec

1

· Rotary Pump FRAME

1

Control Rack

1

TR

1

Utility

· Bellows

⒜ Roughing & Forine

2

· etc.