technology

Batch type E-beam evaporation system-ZV-E Serise

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Price : Call

Code: #16367

Supplier: ZETONE

Batch type E-beam evaporation system

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  • Specifications

    Substrate size

    ~Max. 8inch x 22sheets

    Substrate uniformity

    ≤±5%

    Sample rotation speed

    0~30rpm

    Crucible capacity

    7~40cc

    Output Power

    6~20KW

    Single or converrible e-beam source

    Optional

    Motorized Sample z axis

     

    Planetary substrate holder

 
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