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Advanced Energy Paramount MF RF Plasma Generator (8.0kW, 400kHz)

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Code: #20169

Supplier: Advanced Energy Industries, Inc.

Advanced Energy Paramount MF RF Plasma Generator (8.0kW, 400kHz)

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rightMORE INFORMATION

  • - RF Power: 2.0 kW, 3.0 kW, 5.0 kW, 8.0 kW
    - Frequency: 400 kHz, Frequency tuning ±10%
    - Typical Tune Time: < 100 ms
    - Power Accuracy into 50 Ω: ±2 W or ±1% of set point, whichever is greater
    - Pulsing Frequency Range: 10 Hz ~ 2 kHz
    - Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®
    - RF Power: 5.0 kW
    - Frequency: 2 MHz, Frequency tuning ±10%
    - Typical Tune Time: < 100 ms
    - Power Accuracy into 50 Ω: ±1 W or ±1% of set point, whichever is greater
    - Pulsing Frequency Range: 10 Hz ~ 10 kHz
    - Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®

 

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