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X-eye NF120 Nano-focus X-ray

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Code: #23720

Supplier: SEC Co.,Ltd

X-eye NF120 Nano-focus X-ray.

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  • - Non-destructive analysis system for Wafer Level Packaging
    - High-resolution image with Dual Type CTs
    - TSV, Micro Bump, Pattern

  • X-ray Tube

    120 kV / 200 µA

    Min. Resolution

    0.2㎛

    Table Size

    12inch wafer

    Detector

    6 inch FPXD

    CT Scan Method

    Oblique CT / Cone beam CT

    Foot print

    2,380 x 1,450 x 2,120 mm Control Box : 600 x 1,250 x 1,030 mm

    Weight

    7,000kg

  • - Nano-focus Tube of 200 nano resolution is installed which is specialized for Semiconductor Packaging, Wafer Level Packaging(WLP) requiring detection of Sub-micron defects.
    - Able to trace and inspect defected area precisely by precise movement of axis with Anti-vibration table.
    - Tomography is available if 3D CT module is added and Wafer Bump Automatic Inspection is available from loading to inspection with wafer handler systems.

 

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