Affordable tools for high quality UV microprocessing. VarioLas UV material processing systems based on the COMPexPro 100 Excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each of the VarioLas systems, which are available for the common excimer laser wavelengths 193 nm, 248 nm and 308 nm.