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Code: #16365
Supplier: ZETONE
Batch type Thermal evaporation system
Specifications
Substrate size
piece~6inch
Substrate uniformity
≤±5%
Sample rotation speed
0~30rpm
Sample z-axis travel length
±1inch(Manual)
Heating temperature
~1800℃
AC power supply
≤6KW
Thermal source
Boat, Filament(W, Ta, Mo)
Crucible(Alumina, BN, Ta, No, Quartz)
Effusion cell
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