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VarioLas Family Lasers

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Code: #17723

Supplier: Coherent Inc

Affordable tools for high quality UV microprocessing. VarioLas UV material processing systems based on the COMPexPro 100 Excimer laser series are affordable tools for high quality UV microprocessing. Superior optics design, rugged mechanics and unmatched pulse-to-pulse stability are the key ingredients to each of the VarioLas systems, which are available for the common excimer laser wavelengths 193 nm, 248 nm and 308 nm.

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rightMORE INFORMATION

  • The VarioLas Eco, VarioLas Pro and VarioLas Sweep are available for the common excimer laser wavelengths of 193 nm, 248 nm and 308 nm.

     

    VarioLas Key Features

    Coherent Excimer Laser Inside

    Large Field Size for Parallel Processing

    Line Beam Availability

    Superior Pulse-to-Pulse Stability

    Unmatched Processing Stability

    Modular Concept with Upgrading Options

  • VarioLas Model

    VarioLas Eco

    VarioLas Pro

    VarioLas Sweep

    Field Geometry

    Square

    Square

    Line

    Substrate Field Size (mm2)

    2 x 2

    2 x 2

    50 x 0.6

    Optical Resolution (μm)

    30

    5

    -

    Working Distance (mm)

    50

    50

    100

    Max. Repetition Rate (Hz)

    100

    100

    100

    Max. Energy Density (mJ/cm2) at 193 nm

    1000

    1000

    230

    Max. Energy Density (mJ/cm2) at 248 nm

    3500

    3500

    600

    Max. Energy Density (mJ/cm2) at 308 nm

    3000

    3000

    500

    Energy Stability (%, 1 sigma) at 193 nm

    2

    2

    2

    Energy Stability (%, 1 sigma) at 248 nm

    1

    1

    1

    Energy Stability (%, 1 sigma) at 308 nm

    1

    1

    1

     

    Accessories
     

    Part Number

    Safety Options

    1161813

    Class 1 Housing

    1161812

    Automated Safety Class 3 Interlock Circuit

    1107556

    Automated Beam Shutter for 193 nm

    1107557

    Automated Beam Shutter for 248 nm

    1157558

    Automated Beam Shutter for 308 nm

    Part Number

    Control Options

    1161814

    Control PC (with monitor)

    1161815

    Substrate Stage (3 axes incl. substrate chuck)

    1161816

    Observation Unit (for VarioLasPro, 193 nm)

    1161817

    Observation Unit (for VarioLasPro, 248 nm and 308 nm)

    1161818

    Observation Unit (for VarioLasPro, all wavelengths)

    1161819

    Motorized Attenuator (upgrade)

    1161820

    Motorized Attenuator, Energy Control, Pro/Eco, 193 nm

    1161821

    Motorized Attenuator, Energy Control, Pro/Eco, 248 nm

    1161822

    Motorized Attenuator, Energy Control, Pro/Eco, 308 nm

 

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