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Midas MDA-80FA Automatic Mask Aligner

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Code: #17667

Mask Aligner is equipment used in photo-lithography process and the ability to precisely align the photomask and the substrate with the patterned.

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Type	Full automatic (Mask Aligner)
Mask size	up to 9" x 9"
Substrate size	8"
UV lamp & Power	2kW & power supply
Uniform beam size	10.25" x 10.25"
Beam Uniformity	<±5%
Beam wavelength	350 ~ 450nm
365nm Intensity	~25mW/cm2
Alignment accuracy	1um
Process resolution	1um@1um PR thickness with vacuum contact
Process mode	Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving	x,y,z & θ (Motorized)
Pre-aligner	±50um
Frame	Anti-Vibration system
Options	UV Intensity meter
Options	etc.

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