- Spectral range: 440-1000 nm
- Spot sizes: automatic selection 500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm; 100x100 µm; 50x60 µm; 25x60 µm
- Detection: CCD – Resolution: 2nm
- Sample stage: vacuum chucks, z height 40 mm
- Sample viewing: CCD camera - Field of view: 1.33x1 mm – Resolution: 10µm
- Goniometer: Fixed at 70° - Possible set up at 66° and 61.5°
- Numerous accessories
- Measurement time: <2s, typical 5s
- Accuracy: NIST 100nm d ± 4Å, n(632.8nm) ± 0.002
- Repeatability: NIST 15nm ± 0.2 Å